Professional On Oxygen And Nitrogen Gas Generation Solution.

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas 1

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas 2

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas 3

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas 4

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas 5

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas 6

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas

Pure Nitrogen Generator Machine for Provides Oxidation Prevention for Wafer in Cleaning

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas Pure Nitrogen Generator Machine for Provides Oxidation Prevention for Wafer in Cleaning PSA Nitrogen generator Nitrogen generator

Zhongsu Hengda's high-purity nitrogen generator is a professional, customized solution for wafer manufacturing. Combining advanced nitrogen purification technology and stable supply features, it acts as shielding gas in cleaning lithography and etching—isolating air to prevent silicon wafer oxidation. Its steady delivery of high-purity nitrogen serves as carrier gas, transports reactive gases, and avoids impurities affecting chip performance. Built to be reliable and precise, it enables continuous operation for various wafer processing procedures, guaranteeing consistent quality in semiconductor manufacturing while delivering high-performance outcomes.

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PRODUCT DESCRIPTION

Zhongsu Hengda's high-purity nitrogen generator is a professional, tailored solution for semiconductor wafer fabrication. Integrating ultra-pure nitrogen output technology and precision flow control, it works as protective gas in silicon wafer cleaning lithography and etching—blocking air to avoid oxidation. Its consistent supply of high-grade nitrogen functions as carrier gas, conveys reaction gases, and prevents impurities from impairing chip performance. Built to be robust and accurate, it supports non-stop operation across diverse wafer processes, ensuring stable quality in semiconductor production while delivering reliable outcomes.

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Product parameters

Purity	95%-99.9995%
N2 Capacity	1-2000Nm3/h
Discharge O2 Pressure	0-5.5 Bar (Normal)
O2 Dew Point	－70℃ (Normal)
Operation	Full automatic

PRODUCT INTRODUCTION

ADVANTAGES AND FEATURES

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas 15

Prevents explosions

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas 16

High nitrogen production

Low energy consumption

Full automation and Fast start-up

IMG_6024

Easy to install and maintain

COMMON MODELS

Model	Purity	Capacity	Model	Purity	Capacity	Model	Purity	Capacity
HDFD95-1	95%	1	HDFD99-1	99%	1	HDFD99.5-1	99.5%	1
HDFD95-5		5	HDFD99-5		5	HDFD99.5-5		5
HDFD95-10		10	HDFD99-10		10	HDFD99.5-10		10
HDFD95-20		20	HDFD99-20		20	HDFD99.5-20		20
HDFD95-30		30	HDFD99-30		30	HDFD99.5-30		30
HDFD95-40		40	HDFD99-40		40	HDFD99.5-40		40
HDFD95-50		50	HDFD99-50		50	HDFD99.5-50		50
HDFD95-100		100	HDFD99-100		100	HDFD99.5-100		100
HDFD95-120		120	HDFD99-120		120	HDFD99.5-120		120
HDFD95-150		150	HDFD99-150		150	HDFD99.5-150		150
HDFD95-200		200	HDFD99-200		200	HDFD99.5-200		200
HDFD95-500		500	HDFD99-500		500	HDFD99.5-500		500
HDFD95-800		800	HDFD99-800		800	HDFD99.5-800		800
HDFD95-1000		1000	HDFD99-1000		1000	HDFD99.5-1000		1000
HDFD95-2000		2000	HDFD99-2000		2000	HDFD99.5-2000		2000
HDFD99.9-1	99.9%	1	HDFD99 99-1	99.9%	1	HDFD99.999-1	99.999%	1
HDFD99.9-5		5	HDFD99.99-5		5	HDFD99.999-5		5
HDFD99.9-10		10	HDFD99.99-10		10	HDFD99.999-10		10
HDFD99.9-20		20	HDFD99.99-20		20	HDFD99.999-20		20
HDFD99.9-30		30	HDFD99.99-30		30	HDFD99.999-30		30
HDFD99.9-40		40	HDFD99.99-40		40	HDFD99.999-40		40
HDFD99.9-50		50	HDFD99.99-50		50	HDFD99.999-50		50
HDFD99.9-100		100	HDFD99.99-1.00		100	HDFD99.999-100		100
HDFD99.9-120		120	HDFD99.99-120		120	HDFD99.999-120		120
HDFD99.9-150		150	HDFD99.99-150		150	HDFD99.999-150		150
HDFD99.9-200		200	HDFD99.99-200		200	HDFD99.999-200		200
HDFD99.9-500		500	HDFD99.99-500		500	HDFD99.999-500		500
HDFD99.9-800		800	HDFD99.99-800		800	HDFD99.999-800		800
HDFD99.9-1000		1000	HDFD99.99-1000		1000	HDFD99.999-1000		1000
HDFD99.9-2000		2000	HDFD99.99-2000		2000	HDFD99.999-2000		2000

USER EVALUATE

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas 20

Industry experience

Having been in the industry for years, we know the market situation and industry requirements more clearly than most manufacturers.

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas 21

Market area

We have accumulated extensive knowledge about the quality standards as well as market needs of thesecountries.

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas 22

Team introduction

That is our highly-qualified employees. We have R&D experts, designers, QC professionals, and other highly qualified employees.

99.999% 30Nm3/h High Purity Nitrogen Gas Generator for Wafer Manufacturing Process in Silicon Etching as Protective Gas 23

Product advantages

They outperform their competitors when it comes to durability and performance, deeply trusted by both domestic andforeign customers.

FAQ

The target market of our brand has been continuously developed over the years. For more information, please reach our team, we are more than happy to help.

How to get a prompt quotation?

When you send us inquiry, please kindly tell us the below technical information.

1) O2/N2/H2 Flow rate: ____Nm3/h

2) O2/N2/H2 Purity: ____%

3) O2/N2/H2 Discharge pressure: ____Bar

4) Voltages and Frequency: _____V/PH/HZ

5) Application or use for which industry.

We will recommend the most suitable equipment for you according to your needs.

How long is your delivery time?

Generally it is 10-50 working days depending on your order.

What is the terms of payment?

T/T, L/C, etc.

What is the standard of package?

he equipment is packed in wooden cases of export standard

Do you accept OEM business?

Yes, we are OEM supplier.

What kind of certificate you have ?

We have ISO9001, ISO13485,CE,SGS

Do you have similar customer cases?

Our equipment is used in a wide range of industries and has rich customer cases.You can tell me the application industry and country of the device, and we will provide you with cases.

How to install the equipment after purchase？

You can choose the remote video guide of the engineer or on-site installation.

What if there is a after-sales problem？

Hengda provide guarantees for the equipment in 12 months. And out of the warranty period, we continue to provide service.

Get in touch with us

just leave your email or phone number in the contact form so we can send you a free quote for our wide range of designs