In the industrial production need to use the inert gas with very low oxygen content, then whether the deoxidation catalyst has a good deoxidation capacity becomes particularly important. The palladium carbon deoxidizer selected by “Zhongsu Hengda” can directly remove trace oxygen in the inert gas, and the deoxidation capacity is 10 times larger than that of the general deoxidizer. The deoxidizer does not need frequent regeneration and does not need to quantitatively add the second component such as hydrogen, thus avoiding the re-decline of nitrogen purity caused by the introduction of the second component. The deoxidized gas can be obtained by adsorption and purification. Usually, high purity nitrogen of 99.999% or more is prepared from raw air in combination with pressure swing adsorption nitrogen production. Its excellent performance has been recognized by the majority of users.