Professional On Oxygen And Nitrogen Gas Generation Solution.
99.999% 5Nm3/h Ultra-High Purity PSA Nitrogen Generator for Semiconductor Die Bonding and Precision Electronic Component Packaging
Zhongsu Hengda’s ultra-high purity PSA nitrogen generator delivers 99.999% purity N₂ at 5Nm³/h, specifically engineered for semiconductor chip bonding and precision electronic component packaging to provide critical protection by creating an ultra-pure inert atmosphere that prevents oxidation of bonding pads and internal micro-circuits, ensuring superior mechanical and electrical connection integrity. Featuring an ultra-low dew point to eliminate moisture-related defects like internal voids and package delamination, the system offers a constant, stable output optimized for high-precision bonding stations and cleanroom environments while maintaining ppm-level oxygen control for enhanced wire bonding quality. Built with high-performance components and smart PLC control for seamless automated integration, the system is fully compliant with ISO 9001 and CE standards, proven in IC fabrication to improve first-pass yield and ensure the long-term reliability of mission-critical electronic components.
PRODUCT DESCRIPTION
Zhongsu Hengda’s ultra-high purity PSA nitrogen generator delivers 99.999% pure nitrogen at 5Nm³/h, tailored for critical scenarios in semiconductor chip bonding and precision electronic component packaging to enable high-precision interconnection and stable inert protection for sensitive micro-electronic products. In the bonding and packaging protection stage, the precise 5Nm³/h nitrogen output creates a stable, oxygen-free inert atmosphere around the wire bonding and encapsulation area, curbing the oxidation of bonding pads and internal circuits while inhibiting moisture-related defects like voids and delamination—effectively ensuring superior electrical connectivity and mechanical joint strength, while significantly enhancing the product's first-pass yield and long-term reliability in mission-critical micro-electronics.
SHOW DETAILS
Product parameters
|
Purity |
95%-99.9995% |
|
N2 Capacity |
1-2000Nm3/h |
|
Discharge O2 Pressure |
0-5.5 Bar (Normal) |
|
O2 Dew Point |
－70℃ (Normal) |
|
Operation |
Full automatic |
PRODUCT INTRODUCTION
ADVANTAGES AND FEATURES
COMMON MODELS
|
Model |
Purity |
Capacity |
Model |
Purity |
Capacity |
Model |
Purity |
Capacity |
|
HDFD95-1 |
95% |
1 |
HDFD99-1 |
99% |
1 |
HDFD99.5-1 |
99.5% |
1 |
|
HDFD95-5 |
|
5 |
HDFD99-5 |
|
5 |
HDFD99.5-5 |
|
5 |
|
HDFD95-10 |
|
10 |
HDFD99-10 |
|
10 |
HDFD99.5-10 |
|
10 |
|
HDFD95-20 |
|
20 |
HDFD99-20 |
|
20 |
HDFD99.5-20 |
|
20 |
|
HDFD95-30 |
|
30 |
HDFD99-30 |
|
30 |
HDFD99.5-30 |
|
30 |
|
HDFD95-40 |
|
40 |
HDFD99-40 |
|
40 |
HDFD99.5-40 |
|
40 |
|
HDFD95-50 |
|
50 |
HDFD99-50 |
|
50 |
HDFD99.5-50 |
|
50 |
|
HDFD95-100 |
|
100 |
HDFD99-100 |
|
100 |
HDFD99.5-100 |
|
100 |
|
HDFD95-120 |
|
120 |
HDFD99-120 |
|
120 |
HDFD99.5-120 |
|
120 |
|
HDFD95-150 |
|
150 |
HDFD99-150 |
|
150 |
HDFD99.5-150 |
|
150 |
|
HDFD95-200 |
|
200 |
HDFD99-200 |
|
200 |
HDFD99.5-200 |
|
200 |
|
HDFD95-500 |
|
500 |
HDFD99-500 |
|
500 |
HDFD99.5-500 |
|
500 |
|
HDFD95-800 |
|
800 |
HDFD99-800 |
|
800 |
HDFD99.5-800 |
|
800 |
|
HDFD95-1000 |
|
1000 |
HDFD99-1000 |
|
1000 |
HDFD99.5-1000 |
|
1000 |
|
HDFD95-2000 |
|
2000 |
HDFD99-2000 |
|
2000 |
HDFD99.5-2000 |
|
2000 |
|
HDFD99.9-1 |
99.9% |
1 |
HDFD99 99-1 |
99.9% |
1 |
HDFD99.999-1 |
99.999% |
1 |
|
HDFD99.9-5 |
|
5 |
HDFD99.99-5 |
|
5 |
HDFD99.999-5 |
|
5 |
|
HDFD99.9-10 |
|
10 |
HDFD99.99-10 |
|
10 |
HDFD99.999-10 |
|
10 |
|
HDFD99.9-20 |
|
20 |
HDFD99.99-20 |
|
20 |
HDFD99.999-20 |
|
20 |
|
HDFD99.9-30 |
|
30 |
HDFD99.99-30 |
|
30 |
HDFD99.999-30 |
|
30 |
|
HDFD99.9-40 |
|
40 |
HDFD99.99-40 |
|
40 |
HDFD99.999-40 |
|
40 |
|
HDFD99.9-50 |
|
50 |
HDFD99.99-50 |
|
50 |
HDFD99.999-50 |
|
50 |
|
HDFD99.9-100 |
|
100 |
HDFD99.99-1.00 |
|
100 |
HDFD99.999-100 |
|
100 |
|
HDFD99.9-120 |
|
120 |
HDFD99.99-120 |
|
120 |
HDFD99.999-120 |
|
120 |
|
HDFD99.9-150 |
|
150 |
HDFD99.99-150 |
|
150 |
HDFD99.999-150 |
|
150 |
|
HDFD99.9-200 |
|
200 |
HDFD99.99-200 |
|
200 |
HDFD99.999-200 |
|
200 |
|
HDFD99.9-500 |
|
500 |
HDFD99.99-500 |
|
500 |
HDFD99.999-500 |
|
500 |
|
HDFD99.9-800 |
|
800 |
HDFD99.99-800 |
|
800 |
HDFD99.999-800 |
|
800 |
|
HDFD99.9-1000 |
|
1000 |
HDFD99.99-1000 |
|
1000 |
HDFD99.999-1000 |
|
1000 |
|
HDFD99.9-2000 |
|
2000 |
HDFD99.99-2000 |
|
2000 |
HDFD99.999-2000 |
|
2000 |
USER EVALUATE
FAQ
The target market of our brand has been continuously developed over the years. For more information, please reach our team, we are more than happy to help.
1) O2/N2/H2 Flow rate: ____Nm3/h
2) O2/N2/H2 Purity: ____%
3) O2/N2/H2 Discharge pressure: ____Bar
4) Voltages and Frequency: _____V/PH/HZ
5) Application or use for which industry.
We will recommend the most suitable equipment for you according to your needs.
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